Zibo Dijia Special Gas Co., Ltd. is one of the most reliable manufacturers and suppliers of high purity c3f8 gas in China. If you're going to buy bulk high purity c3f8 gas made in China, welcome to get quotation from our factory. All customized products are with high quality and competitive price.
Product Introduction
High Purity C3F8 Gas, also known as octafluoropropane, is a fluorinated specialty gas used in selected semiconductor manufacturing processes. Its controlled purity and consistent supply help support process requirements in plasma etching, chamber cleaning, and related applications.
|
Parameter |
Details |
|---|---|
|
Product Name |
High Purity C3F8 Gas |
|
Chemical Name |
Octafluoropropane |
|
Molecular Formula |
C3F8 |
|
CAS Number |
76-19-7 |
|
Molecular Weight |
188.02 g/mol |
|
Appearance |
Colorless gas |
|
Flammability |
Nonflammable |
Product Description
C3F8 (octafluoropropane) is a colorless, nonflammable fluorocarbon gas with the molecular formula C3F8. In semiconductor manufacturing, it is used in selected plasma processes where fluorine-containing species help remove or etch specific materials.
The performance of high-purity octafluoropropane depends on both its overall purity and the levels of individual impurities. Moisture, oxygen, and other trace contaminants may affect process stability or product suitability, depending on the equipment and application. For this reason, purity grades and impurity limits should be matched to the customer's process requirements.
For procurement, buyers should confirm the required purity, impurity profile, cylinder specifications, valve connection, and destination-market regulations before placing an order. These details help ensure that the supplied gas is compatible with the intended process and gas delivery system.
- Semiconductor plasma etching: Used in selected etching processes involving silicon-containing materials and dielectric films, subject to process chemistry and equipment design.
- Chamber cleaning: May be used in specific plasma cleaning applications where C3F8 is compatible with the process recipe and system configuration.
- Process development: Supports evaluation and optimization of fluorocarbon-based plasma processes in semiconductor fabrication.
- Specialty gas applications: May be considered for other industrial or research processes requiring octafluoropropane with defined purity specifications.
Application suitability should be confirmed with the process engineer or equipment supplier before use.
Typical Applications
Frequently Asked Questions
Hot Tags: high purity c3f8 gas, China high purity c3f8 gas manufacturers, suppliers, factory
