Electronic Grade Nitrogen
Electronic Grade Nitrogen

Electronic Grade Nitrogen

Our semiconductor grade UHP nitrogen delivers controlled trace contaminants for wafer processing, ideal for cleanroom purge, carrier gas and inert atmosphere applications in electronics manufacturing.
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Zibo Dijia Special Gas Co., Ltd. is one of the most reliable manufacturers and suppliers of electronic grade nitrogen in China. If you're going to buy bulk electronic grade nitrogen made in China, welcome to get quotation from our factory. All customized products are with high quality and competitive price.

 

Product Brief

 

Electronic grade nitrogen is a refined inert gas purified for strict semiconductor manufacturing workflows. This ultra high purity nitrogen in cylinder undergoes rigorous purification and cylinder pre-treatment to eliminate contaminants that can compromise sensitive wafer surfaces. Every batch of UHP N2 gas is tested with trace analytical tools before filling, and each vessel passes leak and cleanliness inspection to meet cleanroom gas delivery standards.

product-700-700

Product Details

 

This electronic grade nitrogen gas is produced with multi-stage purification and online residual gas analysis, holding oxygen, moisture, carbon oxides and hydrocarbon impurities at ultra-low thresholds. Tight impurity limits suppress particle formation and unwanted chemical reactions on silicon substrates during etching, deposition and chamber purging. Fabrication operators can maintain stable process repeatability and reduce wafer scrap, which directly lifts production yield and cuts material waste for semiconductor plants. The cylinder receives baking, high-vacuum evacuation and passivation treatment to reduce internal outgassing, ensuring the gas purity stays consistent throughout the whole service cycle. Each cylinder is fitted with a metal-sealed diaphragm valve with CGA580 connection, minimizing leakage and secondary contamination at gas delivery points. All cylinder marking and hazard labels comply with GHS and IMDG shipping rules, supporting smooth cross-border logistics and import inspection. We provide complete batch COA, residual gas test records and MSDS for every shipment. Procurement teams can carry out incoming quality verification and satisfy internal fab audit requirements conveniently. Our sales team accepts blanket orders and coordinates scheduled shipments to match your production run timeline.

product-700-700

 

Product Description

 

Item

Specification

Product Name

Electronic Grade Nitrogen

Purity

99.999%

CAS NO

7727-37-9

UN NO

1066

EINECS NO

231-783-9

Molecular weight

28.01

Appearance

Colorless, odorless

Melting point

-209.86 ℃

Boiling point

-196 ℃

Density

1.25g/L

DOT Class

2.2

Label

Non-toxic and non-flammable Gas

*Other Grades and Purity Available on Asking

 

Packaging and Shipping

 

Cylinder Capecity

Value

40L

QF-2

47L

QF-2

50L

QF-2

*Other Packages Available on Asking

Anhydrous industrial Hydrogen Chloride hcl Gas
6
7
8

FAQ

 

Q1: What semiconductor processes use semiconductor grade UHP nitrogen?

A1: It is widely used for chamber purging, wafer transport, CVD carrier gas, plasma process shielding and thermal treatment.

Q2: How do you control cylinder cleanliness for ultra high purity N2 in cylinder?

A2: Each cylinder is baked, evacuated and passivated, and residual gas analysis is performed before gas filling.

Q3: Can you adjust impurity limits for special process nodes?

A3: We can customize impurity specifications aligned with your fab internal standards, subject to minimum order terms.

 

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