Zibo Dijia Special Gas Co., Ltd. is one of the most reliable manufacturers and suppliers of electronic grade silane gas in China. If you're going to buy bulk electronic grade silane gas made in China, welcome to get quotation from our factory. All customized products are with high quality and competitive price.
Product Overview
Electronic Grade Silane Gas (SiH₄) is a high-purity silicon precursor used in semiconductor and advanced electronics manufacturing. Under controlled process conditions, silane decomposes or reacts to form silicon-containing films, making it an important source material for chemical vapor deposition (CVD) and related thin-film processes.
In electronic manufacturing, trace impurities can affect film properties, electrical performance, and process reproducibility. Electronic-grade silane is therefore selected according to defined purity requirements and limits for moisture and other process-relevant contaminants. The appropriate specification depends on the deposition technology, equipment design, and sensitivity of the target application.
For procurement teams, evaluating electronic-grade silane involves more than comparing nominal purity percentages. Individual impurity limits, analytical documentation, cylinder and valve compatibility, and delivery requirements should also be reviewed. A current technical data sheet and Certificate of Analysis (CoA) can help verify whether the offered grade meets the intended process requirements.
Product Specifications 99.9999% SiH4, Semiconductor Grade
| Specification | 99.9999% |
| Carbon Monoxide | ≤ 0.05 ppm |
| Carbon Dioxide | ≤ 0.05 ppm |
| Total chloride | ≤ 0.1 ppm |
| Methane | ≤ 0.05 ppm |
| C2-C4 | ≤ 0.1 ppm |
| Nitrogen | ≤ 0.5 ppm |
| Oxygen | ≤ 0.05 ppm |
| Moisture | ≤ 0.1 ppm |
| Silyl Ether | ≤ 0.1 ppm |
| Methyl Silane | ≤ 0.1 ppm |
| Disilane | ≤ 0.3 ppm |
| Hydrogen | ≤ 20 ppm |
| Aluminum | ≤ 0.02 ppba |
| Antimony | ≤ 0.02 ppba |
| Arsenic | ≤ 0.02 ppba |
| Gallium | ≤ 0.02 ppba |
| Boron | ≤ 0.02 ppba |
| Phosphorus | ≤ 0.02 ppba |
| Iron + Chromium + Nickel + Copper + Zinc | ≤ 1 ppba |
*Other Grades and Purity Available on Asking
Package Information
| Cylinder Specifications | Contents | |
| Cylinder Capacity | Valve | Weight |
| 47L | DISS632 | 10 kgs |
| 440L | DISS632 | 120 kgs |
*Other Packages Available on Asking
Buyer Concern Response Table
|
Buyer Concern |
Our Solution |
|
Purity consistency |
Professional purification and inspection ensure stable gas quality |
|
Process reliability |
Controlled composition supports repeatable manufacturing performance |
|
Supply stability |
Organized production and delivery management reduce procurement risks |
|
Custom requirements |
Different purity grades and packaging solutions can be discussed |
|
Technical support |
Professional assistance helps customers select suitable gas solutions |
Typical Applications
- Semiconductor Fabrication
Electronic-grade silane is used as a silicon precursor in selected semiconductor deposition processes. Controlled impurity levels help reduce the risk of contamination that could influence device characteristics or manufacturing consistency.
- Chemical Vapor Deposition
Silane serves as a feed gas in CVD processes for depositing silicon-containing layers. Gas purity and stable delivery are important considerations when controlling film composition, uniformity, and reproducibility.
- Photovoltaic Manufacturing
Silane is used in the production of silicon-based thin films for selected photovoltaic technologies. The required grade depends on the cell architecture, deposition method, and process-specific quality requirements.
- Electronic Materials Research
Research facilities and advanced materials manufacturers use silane in controlled thin-film experiments and silicon-material development. The specification should be selected according to experimental conditions, contamination tolerance, and gas system compatibility.
After-Sales Service & Technical Support
We provide complete support from product consultation and specification confirmation to shipment coordination and application guidance. Our team helps customers select suitable gas solutions and maintain stable supply plans for continuous production.
FAQ
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