Zibo Dijia Special Gas Co., Ltd. is one of the most reliable manufacturers and suppliers of high purity silane gas in China. If you're going to buy bulk high purity silane gas made in China, welcome to get quotation from our factory. All customized products are with high quality and competitive price.
High Purity Silane Gas
High Purity Silane Gas (SiH₄) is a silicon-containing specialty gas used as a precursor for depositing silicon-based films in controlled manufacturing environments. Its ability to decompose under suitable process conditions makes it important in chemical vapor deposition (CVD) and related thin-film technologies.
Silane is widely used in semiconductor fabrication, solar cell manufacturing, and the production of silicon-containing materials. In these applications, gas purity and trace impurity control are important because contaminants may influence deposition behavior, electrical properties, film uniformity, and final product yield.
The appropriate silane grade depends on the process design and contamination tolerance. Procurement teams should confirm the required purity, specific impurity limits, moisture specification, cylinder configuration, valve connection, and delivery requirements before placing an order. High purity should be verified against the current technical specification and Certificate of Analysis (CoA), rather than inferred from the product name alone.
Product Specifications
| Specification | 99.9999% |
| Carbon Monoxide | ≤ 0.05 ppm |
| Carbon Dioxide | ≤ 0.05 ppm |
| Total chloride | ≤ 0.1 ppm |
| Methane | ≤ 0.05 ppm |
| C2-C4 | ≤ 0.1 ppm |
| Nitrogen | ≤ 0.5 ppm |
| Oxygen | ≤ 0.05 ppm |
| Moisture | ≤ 0.1 ppm |
| Silyl Ether | ≤ 0.1 ppm |
| Methyl Silane | ≤ 0.1 ppm |
| Disilane | ≤ 0.3 ppm |
| Hydrogen | ≤ 20 ppm |
| Aluminum | ≤ 0.02 ppba |
| Antimony | ≤ 0.02 ppba |
| Arsenic | ≤ 0.02 ppba |
| Gallium | ≤ 0.02 ppba |
| Boron | ≤ 0.02 ppba |
| Phosphorus | ≤ 0.02 ppba |
| Iron + Chromium + Nickel + Copper + Zinc | ≤ 1 ppba |
*Other Grades and Purity Available on Asking
Packaging Specifications
| Cylinder Specifications | Contents | |
| Cylinder Capacity | Valve | Weight |
| 47L | DISS632 | 10 kgs |
| 440L | DISS632 | 120 kgs |
*Other Packages Available on Asking
After-Sales Service & Technical Support
We provide professional pre-sales consultation, product selection assistance, shipment coordination, and after-sales support. Our team helps customers choose suitable gas solutions, optimize procurement plans, and maintain stable supply channels.
Frequently Asked Questions
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