Electronic Grade Xenon
Electronic Grade Xenon

Electronic Grade Xenon

Our electronic grade xenon gas delivers ultra high purity for semiconductor etching and EUV processes, supplied in clean treated steel cylinders with strict impurity control for wafer fabrication.
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Zibo Dijia Special Gas Co., Ltd. is one of the most reliable manufacturers and suppliers of electronic grade xenon in China. If you're going to buy bulk electronic grade xenon made in China, welcome to get quotation from our factory. All customized products are with high quality and competitive price.

 

Product Brief

 

Electronic grade xenon is a refined noble gas tailored for semiconductor manufacturing and advanced electronics production. This semiconductor xenon gas goes through multi-stage purification and cylinder pre-treatment to eliminate trace contaminants that may damage delicate wafer structures. Each electronic steel cylinder xenon undergoes residual gas analysis before filling, to meet the rigorous cleanliness requirements of cleanroom production lines.

product-700-700

Product Details

 

This UHP xenon gas is processed with advanced purification and online analytical monitoring to keep moisture, oxygen and hydrocarbon impurities at extremely low levels. Strict impurity limits prevent defects, particle formation and surface contamination on silicon wafers during plasma etching and thin film deposition. Fabrication facilities can stabilize wafer yield and reduce scrap rates, which directly improves production profitability for semiconductor manufacturers. The dedicated cylinder cleaning and baking procedure removes residual adsorbed contaminants on inner walls, avoiding secondary gas pollution during long use cycles. Every electronic steel cylinder xenon is fitted with a high-purity diaphragm valve and sealed with metal face seal connections, which minimizes outgassing and leakage risks inside cleanroom environments. Cylinders follow DOT-3AA and ISO 9809 pressure vessel standards, and all labeling complies with GHS and IMDG shipping rules for hassle-free cross-border shipment. We provide complete batch COA, residual gas test reports and MSDS for every consignment. Procurement teams can carry out incoming quality inspection and satisfy internal fab audit requirements conveniently. Our flexible supply schedule supports blanket order placement and just-in-time delivery to match your production run plans.

product-700-700

 

Product Description

 

Item

Specification

Product Name

Electronic Grade Xenon

Purity

6N

CAS NO

7440-63-3

UN NO

2036

EINECS NO

231-172-7

Molecular weight

131.3

Appearance

Colorless, odorless

Melting point

-112 ℃

Boiling point

-107.1 ℃

Density

5.89 kg/m³

DOT Class

2.2

Label

Non-flammable Gas

*Other Grades and Purity Available on Asking

 

Packaging and Shipping

 

Cylinder Capecity

Value

2L

CGA580: G5/8

4L

CGA580: G5/8

40L

CGA580: G5/8

47L

CGA580: G5/8

50L

CGA580: G5/8

*Other Packages Available on Asking

Anhydrous industrial Hydrogen Chloride hcl Gas
6
7
8

FAQ

 

Q1: What semiconductor processes use ultra high purity xenon?

A1: It is widely used for plasma etching, EUV lithography support, ion implantation and thin film deposition in advanced wafer fabrication.

Q2: Do you perform special cylinder treatment for electronic grade xenon?

A2: Yes, each cylinder is baked, evacuated and passivated to reduce outgassing and maintain stable gas purity for cleanroom use.

Q3: Can you supply custom purity grades for special electronic applications?

A3: We can adjust purity and impurity specifications according to your SEMI or internal fab requirements, subject to minimum order limits.

 

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