Zibo Dijia Special Gas Co., Ltd. is one of the most reliable manufacturers and suppliers of ultra pure silane gas in China. If you're going to buy bulk ultra pure silane gas made in China, welcome to get quotation from our factory. All customized products are with high quality and competitive price.
Product Overview
Ultra Pure Silane Gas (SiH₄) is a high-purity silicon precursor used in advanced manufacturing processes that require stringent control of gas composition. Under appropriate process conditions, silane reacts or decomposes to form silicon-containing films, making it an important feed gas for chemical vapor deposition (CVD) and related technologies.
In semiconductor and electronic materials production, trace contaminants can affect film characteristics, electrical properties, and process reproducibility. Ultra-pure silane is therefore selected according to defined purity specifications and individual impurity limits, rather than nominal purity alone. Moisture and other process-relevant contaminants may require particularly close control depending on the application.
For buyers, specification matching is essential. The target purity, impurity profile, analytical methods, cylinder configuration, valve compatibility, and delivery requirements should be confirmed before an order is placed. A current technical data sheet and Certificate of Analysis (CoA) provide important information for evaluating whether a product meets the end user's process requirements.
99.9999% SiH4, Semiconductor Grade
| Specification | 99.9999% |
| Carbon Monoxide | ≤ 0.05 ppm |
| Carbon Dioxide | ≤ 0.05 ppm |
| Total chloride | ≤ 0.1 ppm |
| Methane | ≤ 0.05 ppm |
| C2-C4 | ≤ 0.1 ppm |
| Nitrogen | ≤ 0.5 ppm |
| Oxygen | ≤ 0.05 ppm |
| Moisture | ≤ 0.1 ppm |
| Silyl Ether | ≤ 0.1 ppm |
| Methyl Silane | ≤ 0.1 ppm |
| Disilane | ≤ 0.3 ppm |
| Hydrogen | ≤ 20 ppm |
| Aluminum | ≤ 0.02 ppba |
| Antimony | ≤ 0.02 ppba |
| Arsenic | ≤ 0.02 ppba |
| Gallium | ≤ 0.02 ppba |
| Boron | ≤ 0.02 ppba |
| Phosphorus | ≤ 0.02 ppba |
| Iron + Chromium + Nickel + Copper + Zinc | ≤ 1 ppba |
*Other Grades and Purity Available on Asking
Applications & Solutions
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Semiconductor Manufacturing
Ultra Pure Silane Gas is used as a silicon precursor in selected semiconductor deposition processes. Tight impurity control helps reduce contamination risks in applications where film quality and device performance are sensitive to trace substances.
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Advanced Thin-Film Deposition
Silane is used in CVD and related processes to produce silicon-containing layers. Gas quality, delivery consistency, and process compatibility are important for maintaining repeatable film composition and uniformity.
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Photovoltaic Materials Production
Certain photovoltaic manufacturing processes use silane to produce silicon-based thin films. The required purity depends on the cell design, deposition technology, and acceptable contamination levels.
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Electronic Materials Research
Advanced materials laboratories may use ultra-pure silane in controlled deposition experiments and silicon-material development. The product specification should reflect the experimental objectives, equipment design, and sensitivity to impurities.
Products Description
| Cylinder Specifications | Contents | |
| Cylinder Capacity | Valve | Weight |
| 47L | DISS632 | 10 kgs |
| 440L | DISS632 | 120 kgs |
*Other Packages Available on Asking
Why Choose Us
Choosing Ultra Pure Silane Gas means choosing stable quality, professional specialty gas experience, and application-focused service. We understand that advanced manufacturing customers require consistent performance and dependable cooperation, so we focus on reducing procurement risks and supporting long-term business grow.
FAQ
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