Hexafluoroethane (C₂F₆) is a colorless, odorless fluorine-containing gas that exists in a gaseous state at room temperature and pressure. As a commonly used specialty gas in the electronics industry, its product concentration typically refers to the content of hexafluoroethane in the gas, i.e., the product purity. Higher hexafluoroethane purity indicates lower levels of moisture, oxygen, nitrogen, carbon dioxide, and other fluorine-containing impurities, making it more suitable for production processes with high gas quality requirements.
Electronic-grade hexafluoroethane requires strict control over purity and trace impurities. In actual product testing, in addition to focusing on the main C₂F₆ content, it is also necessary to analyze moisture, oxygen, nitrogen, carbon monoxide, carbon dioxide, and other impurities. For high-purity hexafluoroethane used in industries such as semiconductors, display panels, and photovoltaics, trace impurities in the gas can affect the plasma etching process; therefore, a high level of cleanliness must be maintained during production and filling, and each batch of product must be tested.
If hexafluoroethane is used as a mixed gas, its concentration is usually expressed as a volume fraction or mole fraction, or ppm can be used as a unit of measurement for lower concentrations. For example, a 1% concentration of hexafluoroethane is equivalent to 10,000 ppm. The specific concentration used depends on the equipment type, etching materials, and process conditions. The mixing ratios used in different production stages are not entirely the same; therefore, in practical applications, the gas is usually prepared according to the customer's process requirements.
Regarding product quality control, the purity of hexafluoroethane should be based on the manufacturer's product specifications, test reports, and relevant standards. For electronic-grade products, in addition to ensuring that the main component meets the specified requirements, it is also necessary to pay attention to the purity stability and impurity control levels between batches. During the production process, purification, refining, and gas chromatography are commonly used for product quality control to ensure the stability of hexafluoroethane in semiconductor, photovoltaic, and other electronic industry processes.