Electronic Grade Oxygen

This UHP O2 Gas features tightly capped levels of moisture, nitrogen, carbon monoxide and total hydrocarbons, which are critical to prevent micro-defects, particle generation and unwanted side reactions on silicon wafer surfaces. Stable and consistent gas quality supports uniform oxidation and thin film growth, helping fabs stabilize process repeatability and reduce wafer scrap rates. The cylinder vessels receive special passivation treatment to minimize outgassing after long storage cycles, so the gas purity remains reliable throughout the service life of the cylinder. Each cylinder is fitted with a metal-sealed diaphragm valve with CGA540 connection, which lowers leakage risk and avoids contamination at the gas delivery point. All cylinder markings and hazard labels comply with GHS and IMDG shipping regulations, supporting smooth cross-border logistics and import inspection. We provide full batch documentation including COA, residual gas test records and MSDS for every shipment. Procurement teams can carry out incoming quality verification and satisfy internal fab audit requirements conveniently. Our sales team accepts blanket orders and coordinates scheduled shipments to match your production run timeline.